Peak Performance, OEM Standards
Entrepix remanufactured equipment provides the performance of brand new equipment with costs that fit your budget
Entrepix doesn’t just refurbish equipment; we remanufacture it to meet original OEM specifications. Our extensive knowledge of these tools helps us guarantee that your equipment will run like new.
We completely strip the equipment to the frame and put it through a proprietary cleaning process. Then we assemble the equipment to the desired customer configuration and perform rigorous tests and quality checks to ensure that the equipment performs as well as, if not better than, it did in its original state.
We offer a wide range of refurbished CMP and metrology equipment for sale, all guaranteed to meet OEM specifications.
Entrepix also offers refurbished equipment if remanufactured equipment exceeds your budget.
The Refurbishment Process
We source equipment from original owners and transport it to our facility, where we evaluate the system and test mechanical and electrical functionality. Then, we replace or repair any malfunctioning components.
Next, we reconfigure the tool to the new owner specs, thoroughly clean all processing surfaces, align tool components, and test and upgrade software. We then calibrate to traceable standards, perform a final system evaluation and quality assurance check, and marathon test the wafer handling system.
Our remanufactured and refurbished systems come with a parts and labor warranty. We also offer long-term applications support and parts and service contracts.
We Refurbish
CMP Equipment
CMP polishers
Slurry and chemical delivery systems
Post CMP Cleaning Equipment
OnTrak Series 2 CE
OnTrak Synergy
OnTrak Synergy Integra
Metrology Equipment
Film thickness (dielectric and conductive)
Profilometers
Particle detection
In-line dielectric metrology (Nova)
