AMAT Reflexion®
Entrepix provides parts, upgrades, service, and refurbishment services and refurbished tools for the Applied Materials Reflexion® 3600, Reflexion LK 3800, Reflexion LK Prime®, and Reflexion LK Prime® S integrated CMP tools.
Your Source for Reflexion®
Polisher Replacement Parts
Entrepix is your go-to source for AMAT Reflexion® CMP system replacement parts — even if those parts are obsolete. We have you covered whether you’re looking for a simple pressure transducer for your UPA system, an obsolete motor driver, or need a brand new, fully assembled, and rigorously tested polish head or pad conditioner.
Polish Head Rebuilds
Our experienced equipment engineers are experts in rebuilding all types, sizes, and configurations of CMP heads, including 3 zone Titan, 4 zone Profiler, 6 zone Contour, 8 zone Evo, and 12 zone Horizon. We have the tools and knowledge to get you an optimally functioning head the first time, every time.
Refurbished Reflexion®, at Your Service
Need to expand your 300mm CMP functionality without sourcing an entirely new platform? Entrepix refurbishes your existing Reflexion® tools or can source and refurbish an additional one, including:
Reflexion® 3600
Reflexion® LK 3800
Reflexion® LK Prime®
Reflexion® LK Prime® S
AMAT Reflexion Upgrades
Entrepix offers numerous Applied Materials Reflexion® platform upgrades, including a full range of Teflon coating services, clear assembly covers for easier maintenance and monitoring, and process-specific solutions to address niche needs.
Click below to see our full list of AMAT Reflexion® upgrades.