The New Entrepix DSS-200
The modern OnTrak optimized for increased throughput, ready for the future
The new generation OnTrak system is here, directly from the OEM
The modernized Entrepix DSS-200 double-sided post-CMP wafer cleaner offers the same familiar functionality as the legacy OnTrak system with numerous upgrades for today’s cleaning process demands.
As the OEM for OnTrak systems, Entrepix has engineered the NEW DSS-200 OnTrak for reliability and longevity with support and spares you can depend on.
Our DSS-200 cleaners offer:
Parts exchangeability with legacy OnTrak systems
Replacement and modernization of obsolete parts
Configuration for 100-200mm substrate
Accommodation for smaller wafers with custom-designed carriers
The DSS-200 comes in three configurations: CE, Synergy, and Integra.
DSS-200 applications include:
Post-CMP clean
Pre-bond clean
Pre-photo clean
Advanced packaging applications
Post-metal deposition
Post-ILD deposition
Post-scribe
Substrate manufacturing
OnTrak Upgrades
Upgrades for legacy OnTrak systems with OEM support are available for you, ready to go when you are. Upgrade options include:
Control system and software upgrade
Hastelloy spin carriage
High efficiency heat lamp
Megasonic cleaning
DI water conservation
Through-the-brush delivery
Inline mix dilution
OnTrak Parts Support
Entrepix provides high quality OEM components not only for the new generation of DSS-200 cleaners, but also for the Lam OnTrak DSS Series 1, Series 2 Classic and CE, Synergy, and Integra platforms.
All OnTrak parts are selected or designed to meet and exceed original standards. We provide thorough incoming and outgoing inspections to ensure our customers get exactly what they need.
PM Kit Custom Solutions
Whether you have a brand new DSS-200 with a standard configuration, or have a decades-proven OnTrak system with a multitude of customizations, we have a PM kit for you. Our group of experts and engineers can advise you on the best solution to fit your needs and can assemble together a PM kit for your specific application.
| Entrepix Series 2 CE | Entrepix Synergy | Entrepix Integra | |
|---|---|---|---|
| Cleaning Method | Brush Scrub | Brush Scrub | Brush Scrub |
| Integrated | No | No | Yes |
| Brush Type | Roller PVA | Roller PVA | Roller PVA |
| Downforce Control | Yes | Yes | Yes |
| Edge Scrub | Optional | Optional | Optional |
| MegPie™ Megasonic Transducer | Optional | Optional | Optional |
| Megasonic Nozzle | Optional | Optional | Optional |
| High-Pressure DI Water Spray | Optional | Optional | Optional |
| Heated DI Water Feed | Optional | Optional | Optional |
| Drying Method | Spin + Heat Lamp | Spin + Heat Lamp | Spin + Heat Lamp |
| NH4OH | Yes | Yes | Yes |
| dHF | No | Yes | Yes |
| SC-1 | Pre-Diluted: Yes | Yes | Yes |
| SC-2 | Citric-Based: Yes | Citric OR HCL-Based: Yes | Citric OR HCL-Based: Yes |
| Backside Chemical | Yes | Yes | Yes |
| Metal CMP Cleans | Yes | Yes | Yes |
| STI CMP Cleans | Yes | Yes | Yes |
| Double Contained Process Area | No | Yes | Yes |