Platen Refurbishment
Entrepix provides a full, turn-key refinish and refurbishment service for CMP platens of all shapes and sizes.
AMAT Mirra and Reflexion®
With over 10 years performing platen refurbishment services on AMAT CMP toolsets, Entrepix is the clear choice to save you time, keep tools running, and ensure you are free of stress in keeping platens and your process in top condition. Whether you want to send in your platens for a quick-turn reconditioning with full serial traceability, or would like to take advantage of our exchange programs to minimize tool downtime, there is an Entrepix solution to exceed your expectations.
IPEC, Strasbaugh, and more
Entrepix has a long history refinishing platens for most CMP toolsets in the industry, so whether your need is for a legacy IPEC 372 or 472 platen repair loop or is specific to your niche tool, we’ll ensure you have support.
Make Platen Refurbishment Your Green Initiative
Not only are Entrepix platen refurbishment services cost-effective, but they can also become a part of your sustainability program. We recondition your existing parts, nearly eliminating the need to purchase new replacements that cost significantly more and displace your current platens into landfills.
Concerns regarding PFAS? Entrepix complies with all applicable PFAS regulations and proudly performs refurbishment services in the USA, eliminating difficult-to-navigate import regulations for our domestic customers.