AMAT Mirra
Entrepix provides parts, service, upgrades, and whole-tool refurbishments for Applied Materials Mirra, MirraTrak, and Mirra Mesa CMP systems.
One Source for All Your Mirra Parts Needs
Entrepix is your go-to for AMAT Mirra CMP system replacement parts — even if those parts are obsolete. We have you covered whether you’re looking for a simple cross motor or pressure transducer for your UPA system, or need a fully assembled and tested polish head, HCLU, or pad conditioner.
Polish Head Rebuilds
Our experienced equipment engineers are experts in rebuilding all types, sizes, and configurations of CMP heads. We have the tools and knowledge to get you an optimally functioning head the first time, every time.
AMAT Mirra Upgrades
Entrepix offers a wide array of Applied Materials Mirra platform upgrades, including new and improved head rotation motors and drivers (pictured at right), pad conditioning and wafer handling improvements, coating services, sensing solutions for wafer slip and slurry flow, and our latest generation Entegrity head testing platform that suits all 200mm and 300mm applications.
Click below to see our full list of AMAT Mirra upgrades.
Refurbished Mirras, at Your Service
Need to expand your Mirra functionality without sourcing an entirely new platform? Entrepix refurbishes your existing Mirra tools including:
Mirra 3400 Standalone
MirraTrak
Mirra Mesa
We also specialize in refurbishment of 300mm Reflexion tools, including standard and Reflexion LK, LK Prime, and LK Prime S models.
Concierge design and manufacturing services improve system performance
The Entrepix engineering team will make it for you. We have developed a number of upgrades and custom engineering solutions for CMP equipment, including AMAT Mirra platforms.
You might think it’s magic, but really it’s our experienced, creative team of engineers who know and love CMP.