Strasbaugh CMP Wafer Polishers

Entrepix works with three different models of Strasbaugh CMP equipment.

Strasbaugh 6DS-SP nTegrity

Specs and capabilities:

  • Fully automated precision polishing

  • Ideal for applications that require repeatability with operational and processing flexibility

  • Automatic wafer handling

  • Can polish two wafers on a single platen to maximise throughput capability and quantity

  • Removes materials to polish wafers and achieve flatness, uniformity, and planarization on blanket or patterned device wafers

  • Processing flexibility

  • Repeatable results

  • Wafer sizes of 100mm to 200mm

Strasbaugh 6EC nSpire

Specs and capabilities:

  • Economical CMP tool for research, failure analysis, and low volume production

  • Semi-automatic operations programmable through color touchscreen

  • Repeatable, accurate process control

  • One slurry pump standard, option for second

  • Small dimensions: 48” x 37” x 72”

  • Pad conditioning

  • Wafer sizes of 4 inch, 6 inch, or 8 inch

Strasbaugh 6EG nHance

Specs and capabilities:

  • Economical CMP tool for research, failure analysis, and low volume production

  • Semi-automatic operations programmable through color touchscreen

  • Repeatable, accurate process control

  • Can polish two wafers on a single platen to maximize throughput capability and quantity

  • Removes materials to polish wafers and achieve flatness, uniformity, and planarization on blanket or patterned device wafers

  • Processing flexibility

  • Repeatable results

  • Wafer size of 300mm

Get info on remanufactured Strasbaugh CMP equipment

Want more information on our remanufactured Strasbaugh CMP equipment? Contact us and we’ll be in touch shortly.

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Refurbished SpeedFam IPEC CMP Polishers

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