Your CMP Foundry: Contract Manufacturing and Research & Development

The Entrepix foundry can process your overflow production, provide process engineering solutions and demonstrate equipment performance prior to sales and installation.

Entrepix’ Foundry is home to a variety of wafer production services and R&D that we perform on behalf of our clients. We are here as an extension of your team to assist in device fabrication, volume production, research new processes well as demonstrate and qualify new materials, equipment and consumables.

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Engineering and Technology Development for CMP

Entrepix has a knowledgeable team of engineers and technology experts to help clients in CMP, cleaning, and distributed process flows. We work with all wafer diameters from coupons to 200mm, and help our clients:

Rapidly advance technology
Study cost reduction
Integrate new materials
Develop process improvements
Screen consumables
Assess cost and productivity
Achieve flexibility in design and processing methods

Volume Production

We can help build and produce wafers to your needs and specifications for complete outsourcing and as overflow capacity. As a top 10 IDM, we’ve processed more than one million wafers and are ISO 9001:2015 certified.

We offer guaranteed cycle times and use quality systems like FMEAs, SPC, internal audits, and CARs.

In-House Processing Tool Sets

At Entrepix, we use the following processing tools to meet your success criteria:

Processing ToolsPlatforms
CMPAMAT Mirra: 150-200mm wafer processing
IPEC 472(2): Coupon-200mm
Post-CMP CleansOnTrak DSS-200 Synergy: 100-200mm
OnTrak DSS-200 Series 2: 100-200mm
SRD: 75-200mm

In-House Metrology Equipment

At Entrepix, we use the following metrology tools to ensure uniformity:

Metrology ToolsPlatforms
Dielectric Film ThicknessThermawave Optiprobe 2600DUV
Mikropack UV/Vis/NIR Reflectometer
Conductive Film ThicknessCDE ResMap 168 4-point probe
Substrate ThicknessFSM 413-300
Surface ProfilometerDektak D8 (with ultralow force and 3D mapping)
Tencor P2
Precision Analytical BalanceMettler-Toledo, A and D, Sartorius
Defect InspectionKLA-Tencor SP1 TBI (200mm)
AMAT Orbot WF-736DUO
Defect ReviewLeica optical review (built into AMAT platforms)
Optical MicroscopesNikon Optiphot
Zeiss Ergoplan (with Nomarski DIC)
Leica stereozoom
MiscellaneousVarious analytical and characterization equipment
Also Available (third party)SEM, AFM, TXRF, and other techniques (additional cost)