Equipment Upgrades
Entrepix’ OEM-level upgrades provide greater efficiency, accuracy, and reliability.
OnTrak Upgrades
Entrepix can upgrade many facets of OnTrak capabilities:
Replace hardware and software, update control system
Data system and log files
Module based wafer recovery
Brush and carriage motor
Hastelloy Carriage
Heat lamp safety and throughput
DI water and flow monitor
Inline mix-dilution retrofit
USB and solid state hard drive
Five finger wafer gripper
Power supply retrofit
PCBs
Obsolete component replacements
Applied Materials Mirra Upgrades
Entrepix creates upgrades, replacement parts, custom solutions, and preventative maintenance services that sustain and improve Mirra platform performance for the next 10 to 15 years.
Available upgrades include:
Head rotation motor-driver
Head sweep motor driver
Wet robot driver
Motor assembly upgrades and replacements
Upper pneumatic assembly (UPA)
UPA relocation
Replacements for pneumatic rotary unions and slip ring assembly
High flex cable management
Wafer slip (loss) sensor
DDF3 pad conditioner assembly and upgrade
Mirra head replacement solutions
Clear cover
Printed circuit boards
Complete replacement assembly
Polish head tester
Calibration and test equipment
Slurry and chemical flow control
Dual display replacement
DC power supply drawer and solid state drives
Wafer breakage reduction
HCLU and polish head consumables
Applied Materials Reflexion Upgrades
Entrepix has entered the 300mm equipment market to provide upgrades, replacement parts, custom solutions, and maintenance services that sustain and improve Reflexion platforms used by HVMs for years to come.
Available upgrades include:
Motor assembly upgrades and replacements
Upper pneumatic assembly (UPA)
UPA relocation (legacy 3 and 4 zone)
Replacements for pneumatic rotary unions and slip ring assembly
DDF3 pad conditioner assembly and upgrade
Reflexion head replacement solutions (Titan, Profiler, Contour, Evo)
Clear covers
Teflon coatings for PM reduction
Complete replacement assemblies
Entegrity polish head tester
Calibration and test equipment
Slurry and chemical flow control
Cleaner, load cup, and polish head consumables