Equipment Upgrades

Entrepix’ OEM-level upgrades provide greater efficiency, accuracy, and reliability.

Entrepix can upgrade many facets of OnTrak capabilities: replace hardware and software, update the control system, data system and log files, module-based wafer recovery, brush and carriage motor, Hastelloy carriage, heat lamp safety and throughput..

OnTrak Upgrades

Entrepix can upgrade many facets of OnTrak capabilities:

  • Replace hardware and software, update control system

  • Data system and log files

  • Module based wafer recovery

  • Brush and carriage motor

  • Hastelloy Carriage

  • Heat lamp safety and throughput

  • DI water and flow monitor

  • Inline mix-dilution retrofit

  • USB and solid state hard drive

  • Five finger wafer gripper

  • Power supply retrofit

  • PCBs

  • Obsolete component replacements

Applied Materials Mirra Upgrades

Entrepix creates upgrades, replacement parts, custom solutions, and preventative maintenance services that sustain and improve Mirra platform performance for the next 10 to 15 years.

Available upgrades include:

  • Head rotation motor-driver

  • Head sweep motor driver

  • Wet robot driver

  • Motor assembly upgrades and replacements

  • Upper pneumatic assembly (UPA)

  • UPA relocation

  • Replacements for pneumatic rotary unions and slip ring assembly

  • High flex cable management

  • Wafer slip (loss) sensor

  • DDF3 pad conditioner assembly and upgrade

  • Mirra head replacement solutions

  • Clear cover

  • Printed circuit boards

  • Complete replacement assembly

  • Polish head tester

  • Calibration and test equipment

  • Slurry and chemical flow control

  • Dual display replacement

  • DC power supply drawer and solid state drives

  • Wafer breakage reduction

  • HCLU and polish head consumables

 

Applied Materials Reflexion Upgrades

Entrepix has entered the 300mm equipment market to provide upgrades, replacement parts, custom solutions, and maintenance services that sustain and improve Reflexion platforms used by HVMs for years to come.

Available upgrades include:

  • Motor assembly upgrades and replacements

  • Upper pneumatic assembly (UPA)

  • UPA relocation (legacy 3 and 4 zone)

  • Replacements for pneumatic rotary unions and slip ring assembly

  • DDF3 pad conditioner assembly and upgrade

  • Reflexion head replacement solutions (Titan, Profiler, Contour, Evo)

  • Clear covers

  • Teflon coatings for PM reduction

  • Complete replacement assemblies

  • Entegrity polish head tester

  • Calibration and test equipment

  • Slurry and chemical flow control

  • Cleaner, load cup, and polish head consumables