Refurbished SpeedFam IPEC CMP Polishers

Entrepix can refurbish four different models of SpeedFam IPEC CMP polishers.

SpeedFam IPEC Avanti 472

Specs and capabilities:

  • Fully automated, precision CMP tool

  • Wafer planarization from 100mm to 200mm

  • Suited for repeatable materials polishing applications with operational and processing flexibility

  • Automatic wafer handling

  • Two platen, two-step polishing processing capability maximizes wafer throughput capability and quality

  • Removes semiconductor material using polishing slurry to planarize wafers to achieve flatness and uniformity

  • Provides fully automated precision polishing, processing flexibility, and repeatable results

  • Wafer sizes of 2 inch, 3 inch, 100mm, 125mm, 150mm, and 200mm

Get info on remanufactured SpeedFam IPEC CMP

Want more information on our remanufactured SpeedFam IPEC CMP equipment? Contact us and we’ll be in touch shortly.

Previous
Previous

Refurbished Mirra and Reflexion CMP Equipment

Next
Next

Refurbished Strasbaugh