Refurbished SpeedFam IPEC CMP Polishers
Entrepix can refurbish four different models of SpeedFam IPEC CMP polishers.
SpeedFam IPEC Avanti 472
Specs and capabilities:
Fully automated, precision CMP tool
Wafer planarization from 100mm to 200mm
Suited for repeatable materials polishing applications with operational and processing flexibility
Automatic wafer handling
Two platen, two-step polishing processing capability maximizes wafer throughput capability and quality
Removes semiconductor material using polishing slurry to planarize wafers to achieve flatness and uniformity
Provides fully automated precision polishing, processing flexibility, and repeatable results
Wafer sizes of 2 inch, 3 inch, 100mm, 125mm, 150mm, and 200mm
Get info on remanufactured SpeedFam IPEC CMP
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