CMP Equipment Support and Field Service

On-site CMP support from our experienced Field Service Team

CMP Field Maintenance

 

AMAT Mirra field service

Our expert teams offer comprehensive AMAT Mirra service wherever you are.

OnTrak field service

We come to you to provide OnTrak support and keep your CMP processes running smoothly.

CMP spare parts

Experts will help obtain any spare parts you need and complete repairs for you.

Entrepix offers field support to help you keep your CMP and metrology equipment functioning. Our extensive experience with CMP related equipment enables us to provide knowledgeable insight, skilled repair, and thorough training.

  • Equipment Service

  • PM Contracts

  • Tool Down Support

  • Escalation Support

  • Process Applications Support

  • Tool Install & Decommission

  • Spare Parts

  • Sub-assembly Repair

Repairs and Preventative Maintenance

Entrepix can provide repairs and unscheduled maintenance on-site or remotely, and provide ongoing, as-needed equipment support. For regular, preventative maintenance, we can work with your chosen cadence. We always ensure ISO certification.

Our field experts can help troubleshoot device yield issues, perform comprehensive hardware checks, and perform wafer handling tests.

We offer block hours of guaranteed availability in which we can cover your team’s vacations, extended leave, or turnover.

Entrepix also offers preventative programs for:

  • OnTrak maintenance

  • Mirra maintenance

  • IPEC 472 maintenance

Upgrades

Entrepix can help you upgrade your equipment with new and obsolete parts, and help design upgrades for your specific needs. Our field service experts can examine your machine and help you determine costs, install the part, and ensure your equipment runs exactly as it should.

All our parts, upgrades, and remanufactured equipment meet or exceed OEM specifications and come with a warranty and guaranteed excellent equipment condition.

Training

Our experts can take your teams through every aspect of your equipment, from usage to care and maintenance. On-site training provides your users with hands-on, face-to-face opportunities to ask questions and see the equipment in action. We provide:

  • Mirra training

  • OnTrak training

Need help with training?

Need us to take a look at or provide training for your equipment? Contact us and we’ll reply to you shortly.