Refurbished SpeedFam IPEC CMP Polishers

Entrepix can refurbish four different models of SpeedFam IPEC CMP polishers.

SpeedFam IPEC Avanti 472

Specs and capabilities:

  • Fully automated, precision CMP tool

  • Wafer planarization from 100mm to 200mm

  • Suited for repeatable materials polishing applications with operational and processing flexibility

  • Automatic wafer handling

  • Two platen, two-step polishing processing capability maximizes wafer throughput capability and quality

  • Removes semiconductor material using polishing slurry to planarize wafers to achieve flatness and uniformity

  • Provides fully automated precision polishing, processing flexibility, and repeatable results

  • Wafer sizes of 2 inch, 3 inch, 100mm, 125mm, 150mm, and 200mm

Get info on remanufactured SpeedFam IPEC CMP

Want more information on our remanufactured SpeedFam IPEC CMP equipment? Contact us and we’ll be in touch shortly.

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