General clean and inspections

Clean and lubricate all rails and drives

Baseline equipment

Load calibrations

Platen run out

Head/arm sweep calibrations

Carrier and platen run out

Down force calibration

Back pressure calibrations

Pad conditioner operations check

Unload calibrations

Tool-specific issues addressed

Additional items specific to equipment set

Check and calibrate handing

Spin station function check

Replace brush roller belts

Calibrate brush parallelism

Check all pneumatic cylinders

Input station rollers and belts

Replacement of input station o-rings

Output station drive belts

Brush station drive calibration

Brush station o-rings

Adjust output station

Inspect lifter tips

Baseline evaluation

Backup data files

Review and address error logs

Verify vacuum levels

Handling tests

Clean and lubricate stage

Check stage center offset, orthogonality, and eccentricity

Check flat/notch findler lamp

Test intensity monitors

Test HeNe and IR laser intensity

Check microscope lamp uniformity

Calibrate all wavelengths