SpeedFam Auriga Platforms Spare Parts


Entrepix provides the highest quality components for SpeedFam’s Auriga (Auriga, Auriga-C, Auriga-EC) CMP platforms. All Auriga spare parts offered by Entrepix have been selected or designed to meet OEM standards. Order accuracy is essential for our customers, therefore outgoing inspections are provided.


Professional support and consulting are available through our inside sales group and product managers.


For a quote:
E-Mail parts@entrepix.com or call +1 602 426-8677