Strasbaugh Refurbished CMP Equipment

Strasbaugh 6EC nSpire CMP Wafer Polisher

For Strasbaugh refurbished CMP equipment:
info@entrepix.com


For Strasbaugh CMP spare parts:
parts@entrepix.com


For Strasbaugh service or maintenance:
service@entrepix.com

Or Call:
602-426-8677



Strasbaugh 6EC nSpire - CMP Wafer Polisher

The Strasbaugh 6-EC model is an economical tool for chemical mechanical planarization (CMP) research, failure analysis and low volume production. Its semi-automatic operations are programmable through a color touch screen graphical user interface (GUI) for repeatable and accurate process control.


The 6-EC comes standard with one slurry pump and the option for a second. The small dimensions (48-inch x 37-inch x 72-inch) offers one of the smallest stand-alone systems with pad conditioning. The system is available for 4-inch, 6-inch or 8-inch wafers.


Preventative Maintenance Program


Overview

  • General Clean and Inspections
  • Clean and Lubricate All Rails and Drives
  • Baseline Equipment
  • Load Calibrations
  • Platen Run Out
  • Arm Sweep Calibrations
  • Carrier Run Out
  • Down Force Calibration
  • Back Pressure Calibrations
  • Pad Conditioner Operations Check
  • Unload Calibrations
  • Tool-Specific Issues Addressed