Entrepix: Your CMP Equipment and Cleans Partner

Entrepix Offers Reflexion Parts and Services

We’ve entered the 300mm equipment market with numerous offerings for Applied Materials Reflexion, LK, LK Prime, and LK Prime S CMP tools to support your parts, service, and obsolescence needs for years to come. New supported items are being added regularly!

Read Our Latest Case Study!

Our process engineering team recently completed and published an in-depth study of new carrier film materials to address recent obsolescence of industry staples, including DF200. Check out the results in Semiconductor Packaging News!

Home of the New OnTrak DSS-200 Cleaner

After becoming the OnTrak OEM nearly a decade ago, Entrepix’ latest iteration of the DSS-200 OnTrak is equipped with all the functionality of the legacy OnTrak and the modern upgrades you need to ensure consistent performance, experienced field support and readily available replacement parts.

The new Entrepix DSS-200 OnTrak is equipped with all the functionality of the legacy OnTrak and the modern upgrades you need.

Engineered Products

The Entrepix Polish Head Motor Driver Combo is a field-proven direct replacement for the NSK motors and drivers for the Applied Materials Mirra polishing platform.

CMP Equipment Upgrades

The Entrepix Polish Head Motor Driver Combo is a field-proven direct replacement for the NSK motors and drivers for the Applied Materials Mirra polishing platform.

Chemical Mechanical Polishing (CMP) parts, polisher replacement parts, and more. Entrepix-engineered upgrades.

CMP Replacement Parts

CMP parts, polisher replacement parts, and more. Mitigate obsolescence with our sustainable supply of new parts and Entrepix-engineered upgrades. Our Shopify page helps you identify the parts you need.

Your Home Base for Semiconductor Equipment

 

Looking for used or refurbished semiconductor equipment or semiconductor equipment repair? Come to Entrepix for your semiconductor needs.

CMP Field Service

Entrepix offers field support to help you keep your CMP and metrology equipment functioning. Our extensive experience with CMP equipment like AMAT Mirra polishers, IPEC 472 polishers, and Strasbaugh equipment enables us to provide knowledgeable insight, skilled repair, and thorough training.

CMP Foundry

Our team of engineers and technology experts are here to help you design and experiment with new technology and ideas. We provide CMP services to advance your technology, integrate new materials into known processes and more.

We are ISO 9001:2015 certified with more than a million wafers processed to date.

Beyond Legacy: The Entrepix Entegrity CMP Head Tester

An innovative polishing head test system with powerful capabilities that transform polisher head testing into a powerful troubleshooting platform to ensure consistent results and high equipment availability.

The Center of CMP Innovation

Our team of in-house engineers can not only reverse engineer and replicate any part you need, we can design parts that don’t exist based on your needs. If you have a problem without a solution, We’ll help you figure out how to solve it — and manufacture it for you.

Refurbished CMP Equipment

Entrepix refurbishes CMP equipment; post CMP equipment like the OnTrak Classic, OnTrak CE, Ontrak Synergy, and OnTrak Integra; and metrology equipment.